Vistec Electron Beam GmbH

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Vistec provides Variable Shaped Beam (VSB) e-beam lithography systems

Vistec Electron Beam GmbH, Jena (Germany) provides leading technology solutions for advanced electron-beam lithography. Based on the Variable Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for industrial and advanced research applications (e.g. semiconductor manufacturing, incl. compound semiconductor, mask writing, photonics).Efficient data processing & innovative exposure strategies (e.g. Cell Projection) open up new applications (e.g. AR/VR).Vistec´s technology features automated handling, as well as high flexibility, writing accuracy and productivity and therefore is suitable for prototyping and low volume production.In addition to its production facility in Germany, Vistec maintains service & support centers in Asia Pacific, USA and Europe.