SPM AG

About

Spare parts, equipment and repair services for semiconductor manufacturing.

Headquartered in Schaan, Liechtenstein, with operations in Croatia, SPM AG supplies spare parts and equipment and offers repair and refurbishment services for semiconductor manufacturing across Europe. The portfolio includes sealing and wafer-handling components, sputtering targets, quartz and ceramic parts, RF generators, inspection and process-control equipment, and sub-fab products such as heating jackets. Coating services are available for semiconductor equipment components. Repair and refurbishment services cover heaters, motors and drivers, lasers, electrostatic chucks and other equipment. Sputtering target bonding is performed in-house. Each request starts with your technical requirements, whether the application calls for a standard product or a customized option.