Precursor vaporization systems for CVD, PECVD, and ALD. Liquid and gas supply.
Sophisticated systems for handling gases and liquids—that is SIGA. We specialize in precursor vaporization systems for CVD, PECVD, and ALD equipment (handling TMA, DMZ, HMDS, HMDSN, TMDSO, and many others).Our systems have been used in development and production for 30 years. We manufacture both, series and customer tailored systems for industry and research, combining established standards with innovative solutions.We supply:- Precursor vaporization systems for liquid precursors- Precursor supply systems- Gas supply systemsAs an independent provider, we implement vaporization systems based on all standard technologies, utilizing the optimal available components.
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SEMICON Europa > Factory Monitoring & Control Systems (FMCS) > Gas Handling - Cabinets [crosswalk: SEMICON Europa > Factory Monitoring & Control Systems (FMCS)]
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Checked 26 Sept 2026
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SEMICON Europa > Factory Monitoring & Control Systems (FMCS) > Gas Handling - Cabinets [crosswalk: SEMICON Europa > Factory Monitoring & Control Systems (FMCS)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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SEMICON Europa > Gases > Other Specialty [crosswalk: SEMICON Europa > Gases]
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SEMICON Europa > Process Equipment > Deposition [crosswalk: SEMICON Europa > Process Equipment]
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Kesselbodenstr. 4b, 85391 Allershausen, Germany
Allershausen, Germany
Trade-fair listing
Germany
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| Capability | Documented scope | Supporting source |
|---|---|---|
| Printed & flexible electronics | Listed capability; detailed scope not provided. | Source & evidenceTrade-fair listing |
Trade-fair listing
Automation (A) [crosswalk: Automation (A)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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Renewable energies/Photovoltaics (P) [crosswalk: Renewable energies/Photovoltaics (P)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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Trade-fair listing
SEMICON Europa > Factory Monitoring & Control Systems (FMCS) > Gas Handling - Cabinets [crosswalk: SEMICON Europa > Factory Monitoring & Control Systems (FMCS)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
SEMICON Europa > Factory Monitoring & Control Systems (FMCS) > Gas Handling - Cabinets [crosswalk: SEMICON Europa > Factory Monitoring & Control Systems (FMCS)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
SEMICON Europa > Gases > Other Specialty [crosswalk: SEMICON Europa > Gases]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
SEMICON Europa > Process Equipment > Deposition [crosswalk: SEMICON Europa > Process Equipment]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
SEMICON Europa > Printed, Organic, Flexible and Large Area > Equipment: Printing, coating [crosswalk: SEMICON Europa > Printed, Organic, Flexible and Large Area]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
Automation (A) [crosswalk: Automation (A)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
Renewable energies/Photovoltaics (P) [crosswalk: Renewable energies/Photovoltaics (P)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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Germany
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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electronica 2026 exhibitor directory · 26 Sept 2026
electronica 2026 exhibitor directory · 26 Sept 2026
electronica 2026 exhibitor directory · 26 Sept 2026
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