ProSys specializes in megasonics for wet single wafer and batch applications.
ProSys is the leading specialist in megasonic enhanced processing for single wafer and batch applications.• FEOL/BEOL cleaning• Megasonic performance boost for existing nozzle-applications• Contactless Edge Bevel Cleaing• Post-CMP-, Pre-Bond-, and Mask cleaning• TSV/VIA cleaning• Fragile MEMS cleaning: Gentle and highly efficient• Resist Strip/Develop• Metal Lift-Off• Post-Dicing cleaning (Saw, Laser, Plasma)Parameters of all ProSys systems are measured and controlled in real-time. Our MegPie™ is the industrystandard for sub 20 nm cleaning in high volume device manufacturing thanks to an unmatched cleaningefficiency and uniformity.Our direct batch systems run without active cooling and help increase cleaning efficiency, throughput, andreduce tool downtime.
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SEMICON Europa > Packaging and Assembly Equipment > Cleaning [crosswalk: SEMICON Europa > Packaging and Assembly Equipment]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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SEMICON Europa > Process Equipment > Chemical Mechanical Polishing (CMP) [crosswalk: SEMICON Europa > Process Equipment]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
1745 Dell Avenue, Campbell, CA 95008, USA
CA 95008, United States
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USA
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electronica 2026 exhibitor directory
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Automotive (AE) [crosswalk: Automotive (AE)]
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Consumer electronics (CO) [crosswalk: Consumer electronics (CO)]
electronica 2026 exhibitor directory
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Trade-fair listing
SEMICON Europa > Packaging and Assembly Equipment > Cleaning [crosswalk: SEMICON Europa > Packaging and Assembly Equipment]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
SEMICON Europa > Process Equipment > Chemical Mechanical Polishing (CMP) [crosswalk: SEMICON Europa > Process Equipment]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
Trade-fair listing
Automotive (AE) [crosswalk: Automotive (AE)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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Consumer electronics (CO) [crosswalk: Consumer electronics (CO)]
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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USA
electronica 2026 exhibitor directory
Checked 26 Sept 2026
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electronica 2026 exhibitor directory
Checked 26 Sept 2026
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electronica 2026 exhibitor directory
Checked 26 Sept 2026
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electronica 2026 exhibitor directory · 26 Sept 2026
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