MSP, a Division of TSI

About

Wafer Contamination & Cleaning Standards. Vapor Delivery Solutions for ALD & CVD

MSP, a Division of TSI®, supports the semiconductor industry with innovative solutions for vapor delivery in CVD and ALD as well as surface defect inspection and metrology. Our instruments and services contain:MSP's Turbo II™ vaporizers, vapor/gas filters, and liquid flow controllers to ensure precise vapor delivery, high-quality thin films, and increased wafer yields Trusted particle deposition systems, certified contamination standards, and reliable particle suspensions to calibrate and optimize wafer/reticle inspection tools and wafer/mask cleaning equipmentWe look forward to meeting you at our Booth 722 in Hall B0!